Design, fabrication and characterization of LTCC micro-hotplates for gas-sensing application
- Year : 2020 Author : Kulhari, L; Chandran, A; Ray, K; Khanna, PK
- Research Area :Materials Science & Technology Division (MSTD) Journal : MICROELECTRONICS INTERNATIONAL
- DOI :10.1108/MI-06-2019-0035
- Publication Date :